Graphene and VLSI Interconnects

Cher-Ming Tan,Udit Narula,Vivek Sangwan

Graphene and VLSI Interconnects
Format
Hardback
Publisher
Jenny Stanford Publishing
Country
Singapore
Published
25 November 2021
Pages
116
ISBN
9789814877824

Graphene and VLSI Interconnects

Cher-Ming Tan,Udit Narula,Vivek Sangwan

Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects Provides the basic understanding of graphene-Cu interaction mechanism
Introduces a novel graphene growth process and graphene-assisted electroless copper plating

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