Graphene and VLSI Interconnects
Cher-Ming Tan,Udit Narula,Vivek Sangwan
Graphene and VLSI Interconnects
Cher-Ming Tan,Udit Narula,Vivek Sangwan
Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects Provides the basic understanding of graphene-Cu interaction mechanism
Introduces a novel graphene growth process and graphene-assisted electroless copper plating
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