MEMS Mechanical Sensors
Steve P. Beeby,Graham Ensel,Michael E. Kraft,Neil M. White
MEMS Mechanical Sensors
Steve P. Beeby,Graham Ensel,Michael E. Kraft,Neil M. White
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
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