MEMS Mechanical Sensors

Steve P. Beeby,Graham Ensel,Michael E. Kraft,Neil M. White

MEMS Mechanical Sensors
Format
Hardback
Publisher
Artech House Publishers
Country
United States
Published
30 April 2004
Pages
284
ISBN
9781580535366

MEMS Mechanical Sensors

Steve P. Beeby,Graham Ensel,Michael E. Kraft,Neil M. White

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

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