This book includes a collection of state-of-the-art reviews written by leading researchers in the areas of micromechanics, micro-scale testing, MEMS, micro-flows, nanocrystalline materials and multi-scale modelling. The structure and properties of MEMS materials, multi-scale modelling of materials (e.g., multi-grid, probabilistic, stochastic, Voronoi cells, homogenisation, micropolar) and micro-flows are discussed in great details. The book is an exceptional resource on multi-scale methods, modelling of materials, MEMS and micro-fluidics with particular emphasis on electrostatic and electrokinetic effects. Extensive bibliography concerning all these topics is included. Highlights on nanoscale effects in materials, MEMS, and the latest multi-scale methods are presented. Numerous illustrations of micro-scale testing, materials microstructure, MEMS-related applications, electrostatic and electrokinetic phenomena are discussed. This book provides a comprehensive review of the latest developments in micromechanics of nanostructured materials and micro-flows, as well as advanced multi-scale methods for the analysis of materials and complex flow in nanotechnology. Material of the book is