Wafer Fabrication: Factory Performance and Analysis

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Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. This book aims to provide this perspective. The author presents a complete treatment of both the technology of wafer fabrication and the factories where it occurs, while presenting methods for the analysis and prediction of the performance of these factories. Offering a comprehensive understanding of the wafer fab process, this book is intended for a wide range of engineers and managers in the electronics industry.