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The proceedings of the 6th International Workshop on Statistical Metrology, held in 2001. The papers cover: yield ramping methodology; metrology for statistical process control; sensor and measurement technology; spatial and temporal variation analysis methods; robust design; and more.
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The proceedings of the 6th International Workshop on Statistical Metrology, held in 2001. The papers cover: yield ramping methodology; metrology for statistical process control; sensor and measurement technology; spatial and temporal variation analysis methods; robust design; and more.