Spectroscopic Ellipsometry and Reflectometry: A User’s Guide

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Ellipsometry is an optical technique used to measure thickness and optical properties of thin films. Single wave ellipsometry has been around for years, but now spectroscopic ellipsometry has entered the mainstream of industrial laboratories. This is a practical introduction to spectroscopic ellipsometry and the related technique of reflectometry. In addition to an introduction to the fundamentals, the book includes applications and case studies.