Digital Holography for MEMS and Microsystem Metrology

Approaching the topic of digital holography from the practical point of view of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection. The author addresses the field of particle characterization where digital holography has proven its capability for dynamic measurement of particles in 3D for sizing and shape characterization which offers applications in microfluidics as well as crystallization and aerosol detection studies. Other applications covered include micro-optical and diffractive optical systems and the testing of these components, and bio-imaging. Digital Holography for MEMS and Microsystem Metrology takes a practical applications-based approach yet includesa thorough enough theoretical background to allow users a means of understanding basic concepts & thus identify areas where this technique can be adopted. This ensures its relevance and appeal not only to researchers but also companies who might want to see the potential of such systems for integration into their existing machines and processes.