Analysis and Design Principles of MEMS Devices

6 ½ X 9 7/16 in Chapter 1. Introduction to MEMS devices

1.1. Piezoresistive pressure sensor

1.2. Piezoresis tive Accelerometer

1.3. Capacitive Pressure Sensor, A ccelerometer and Microphone

1.4. Resonant Sensor and V ibratory Gyroscope

1.5. Micro Mechanical Electric and Optical Switches

1.6. Micro Mechanical Motors
1.7. Micro Electro Mechanical Systems

1.8 . Analysis and Design of MEMS Devices

Chapter 2. Basic Mechanics of Beam and Diaphragm Structures

2.1. Stress and Strain

2.2. Stre ss and Strain of Beam Structures

2.3. Vibration Frequ ency by Energy Methods

2.4. Vibration Modes and the Bu ckling of a Beam

2.5. Damped and forced vibration

2.6. Basic Mechanics of Diaphragms

2.7. Problems

Chapter 3. Air Damping STRONG>

3.1. Drag Effect of a Fluid