For the first time several different diverse but related topics concerned with semiconductor growth are brought together in a single text. Techniques used to gain information about the growing surface, a crucial condition in order to design semiconductor structures in a controllable manner, are examined before efforts are made to understand the semiconductor interface from both theoretical and experimental approaches. The fabrication and evolution of surface morphology are discussed followed by investigations of the monitoring and control of the interface. Those studying semiconductor growth from any perspective should find this book useful, and it should also be useful for all in the semiconductor industry, whether applying or manufacturing. This book should be of interest to materials scientists, electronic engineers and physicists concerned with research and development in semiconductors.