Beam Technologies for Integrated Processing

Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems,Commission on Engineering and Technical Systems,National Research Council,National Academy of Sciences

Beam Technologies for Integrated Processing
Format
Paperback
Publisher
National Academies Press
Country
United States
Published
15 January 1992
Pages
106
ISBN
9780309046350

Beam Technologies for Integrated Processing

Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems,Commission on Engineering and Technical Systems,National Research Council,National Academy of Sciences

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

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