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Add to list Added to list Database Needs for Modeling and Simulation of Plasma Processing
Panel on Database Needs in Plasma Processing,Commission on Physical Sciences, Mathematics, and Applications,Division on Engineering and Physical Sciences,National Research Council,National Academy of Sciences
In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma…
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