Search results for ‘Michael A. Lieberman, Allan J. Lichtenberg’

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      Cover image for Principles of Plasma Discharges and Materials Processing
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      Principles of Plasma Discharges and Materials Processing

      Michael A. Lieberman, Allan J. Lichtenberg

      A new edition of this industry classic on the principles of plasma processing

      Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro-…

      $203.99

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