Search results for ‘M. Elwenspoek (University of Twente, Enschede, The Netherlands),H. V. Jansen (University of Twente, Enschede, The Netherlands)’

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      Silicon Micromachining

      M. Elwenspoek (University of Twente, Enschede, The Netherlands),H. V. Jansen (University of Twente, Enschede, The Netherlands)

      This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and…

      $125.99

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