Search results for ‘J. Michael Sherer (Sherer Consulting Services, Gilbert, Arizona, USA)’

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      Semiconductor Industry: Wafer Fab Exhaust Management

      J. Michael Sherer (Sherer Consulting Services, Gilbert, Arizona, USA)

      Given the myriad exhaust compounds and the corresponding problems they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals…

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