Hardback
Add to list Added to list Fabrication of GaAs Devices
Albert G. Baca (Sandia National Laboratories, New Mexico, USA),Carol I.H. Ashby (Sandia National Laboratories, New Mexico, USA)
This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography.
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