The term MicroNano Integration , in this context, addresses the enormous potential of synergy effects, provided by the combination and mutual integration of micro- and nanotechnological elements.In order to discuss the integration aspects of micro- and nanotechnologies, the International Forum on MicroNano Integration , a conference, held in Potsdam, Germany on December 3-4, 2003 brought together researchers from both communities - from industries as well as from scientific institutions.